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For Semiconductor and LCD
  manufacturing
 
ID Product name and contents Application Dimensions and specifications Download
4640

Flourine pasteO-ring

Available in white, tan, and assorted other colors.

For use in equipment that requires heat, chemical, pharmaceutical, and grease-resistant properties.

・JIS B 2401
・AS 568
・ISO/R 1799
・NAS 1593,1594,1595,1596

 
H4640

Heat-resistant fluorine paste O-ring

Black

Compared to popular flourine pastes in use, this heat-resistant flourine paste exhibits better Shape retention under pressure, helping to increase the operational lifetime of your equipment and reducing the need for maintenance.

・JIS B 2401
・AS 568

 
AC4640

Armor Crystal O-ring

Transparent (will not produce particles)

Because of the lack of any filler this product has a high level of clarity.

Its metal anti-adhesive and plasma-resistant qualities make this product widely used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations. 

・JIS B 2401
・AS 568

F4640

Flid O-ring

Black

Excellent mechanical properties, principally used in vacuum gates in semiconductor and panel board manufacturing equipment.

・JIS B 2401
・AS 568

 
FA4640

Flid Armor O-ring

Black low-friction 

Excellent mechanical properties, especially Adhesive to metals.

Principally used in vacuum gates in semiconductor and panel board manufacturing equipment

・JIS B 2401
・AS 568

SA4640

Spoq Armor O-ring

White

High clarity, plasma-resistant. Adhesive to quartz, widely used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations. 

・JIS B 2401
・AS 568

HA4640

Hyrec Armor  O-ring

Transparent amber

Plasma-resisant 

Extremely high clarity, plasma-resistant.  Adhesive to metals, widely used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations (specifically for use in fixed components)

・JIS B 2401
・AS 568

UA4640

Ultic Armor O-ring

Transparent amber

Plasma-resisant

Extremely high clarity, plasma-resistant.

High heat-resistance and Adhesive to metals, used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations.

・JIS B 2401
・AS 568

LA4640

Labe Armor O-ring

Blue

O2 and
Plasma-resistant 

O2 and plasma-resistant, Adhesive to quartz, used in the semiconductor and panel board industries for ashing equipment.

・JIS B 2401
・AS 568

 
UAF4640

Ultic Armor F O-ring  

Deep blue

Plasma-resisant 

Extremely high clarity, plasma-resistant.

High heat-resistance and Adhesive to metals, used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations 

・JIS B 2401
・AS 568

VPTR4640

Fluoritz TR O-ring

Dark brown

High resistance to free radicals, low warping, high heat resistance,  used in the semiconductor and panel board industries for dry etching, ashing, CVD and related operations. 

・JIS B 2401
・AS 568

UB4060

Bonded, Seal Plate 

Ultic Armor

Adhesive to metal upper seal plate

For use on commonly seen O-ring Slit Valve upper cracks, effective in repairing loosened sections.